SEM stands for scanning electron microscope. The SEM is a microscope that uses electrons instead of light to form an image. Since their development in the early 1950's, scanning electron microscopes ...

Figure 6: Phase space for operation of a scanning electron microscope at a fixed source brightness. Such new source designs may well halve the energy spread while doubling beam brightness.

Critical Dimension Scanning Electron Microscopy (CD-SEM) is a powerful tool that enables researchers and manufacturers to visualize and quantify nanoscale features with incredible accuracy, playing a ...